About this Item
100% Customer Satisfaction Guaranteed ! The book shows some signs of wear from use but is a good readable copy. Cover in excellent condition. Binding tight. Pages in great shape, no tears. Not contain access codes, cd, DVD. Seller Inventory # PSG0130850373
Bibliographic Details
Title: Silicon VLSI Technology: Fundamentals, ...
Publisher: Pearson
Publication Date: 2000
Binding: Hardcover
Condition: good
About this title
Unique in approach, this book provides an integrated view of silicon technology--with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies. Modern CMOS Technology. Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers. Semiconductor Manufacturing--Clean Rooms, Wafer Cleaning and Gettering. Lithography. Thermal Oxidation and the Si/SiO2 Interface. Dopant Diffusion. Ion Implantation. Thin Film Diffusion. Etching. Backend Technology. For anyone interested in Fabrication Processes.
Unique in approach, this book provides an integrated view of silicon technology—with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies.
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