About this Item
Acceptable/Fair condition. Book is worn, but the pages are complete, and the text is legible. Has wear to binding and pages, may be ex-library. 2.8. Seller Inventory # 353-0130850373-acp
Bibliographic Details
Title: Silicon VLSI Technology: Fundamentals, ...
Publisher: Pearson College Div
Publication Date: 2000
Binding: Hardcover
Condition: Fair
About this title
Unique in approach, this book provides an integrated view of silicon technology--with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies. Modern CMOS Technology. Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers. Semiconductor Manufacturing--Clean Rooms, Wafer Cleaning and Gettering. Lithography. Thermal Oxidation and the Si/SiO2 Interface. Dopant Diffusion. Ion Implantation. Thin Film Diffusion. Etching. Backend Technology. For anyone interested in Fabrication Processes.
Unique in approach, this book provides an integrated view of silicon technology—with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies.
FEATURES/BENEFITS
"About this title" may belong to another edition of this title.
Store Description
Payment Methods
accepted by seller