Silicon VLSI Technology: Fundamentals, Practice and Modeling
Plummer, James D.
From Books of the Smoky Mountains, Del Rio, TN, U.S.A.
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Quantity: 1From Books of the Smoky Mountains, Del Rio, TN, U.S.A.
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Quantity: 1About this Item
Gently used book with ongoing seller support until you're fully satisfied with your purchase. Seller Inventory # oldport0130850373
Bibliographic Details
Title: Silicon VLSI Technology: Fundamentals, ...
Publisher: Pearson
Publication Date: 2000
Binding: Hardcover
Condition: very good
About this title
Unique in approach, this book provides an integrated view of silicon technology--with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies. Modern CMOS Technology. Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers. Semiconductor Manufacturing--Clean Rooms, Wafer Cleaning and Gettering. Lithography. Thermal Oxidation and the Si/SiO2 Interface. Dopant Diffusion. Ion Implantation. Thin Film Diffusion. Etching. Backend Technology. For anyone interested in Fabrication Processes.
Unique in approach, this book provides an integrated view of silicon technology—with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies.
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