Hardback. New. Fundamentals of Semiconductor Manufacturing and Process Control examines in detail the methodology by which electronic materials and supplies are converted into finished integrated circuits, and electronic products in a high-volume manufacturing environment. ISBN 0471784060 9780471784067 [GB]

ISBN10: 0471784060, ISBN13: 9780471784067, [publisher: John Wiley & Sons Inc, Chichester] Hardcover First Edition Hardcover. A practical guide to semiconductor manufacturing from process control to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts. Following an overview of manufacturing and technology, the text explores process monitoring methods, including those that focus on product wafers and those that focus on the equipment used to produce wafers. Next, the text sets forth some fundamentals of statistics and yield modeling, which set the foundation for a detailed discussion of how statistical process control is used to analyze quality and improve yields. The discussion of statistical experimental design offers readers a powerful approach for systematically varying controllable process conditions and determining their impact on output parameters that measure quality. The authors introduce process modeling concepts, including several advanced process control topics such as run-by-run, supervisory control, and process and equipment diagnosis. Critical coverage includes the following: * Combines process control and ...

ISBN10: 0471784060, ISBN13: 9780471784067, [publisher: John Wiley & Sons Inc, Chichester] Hardcover First Edition Hardcover. A practical guide to semiconductor manufacturing from process control to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts. Following an overview of manufacturing and technology, the text explores process monitoring methods, including those that focus on product wafers and those that focus on the equipment used to produce wafers. Next, the text sets forth some fundamentals of statistics and yield modeling, which set the foundation for a detailed discussion of how statistical process control is used to analyze quality and improve yields. The discussion of statistical experimental design offers readers a powerful approach for systematically varying controllable process conditions and determining their impact on output parameters that measure quality. The authors introduce process modeling concepts, including several advanced process control topics such as run-by-run, supervisory control, and process and equipment diagnosis. Critical coverage includes the following: * Combines process control and ...

ISBN10: 0471784060, ISBN13: 9780471784067, [publisher: John Wiley and Sons Ltd] Hardcover Fundamentals of Semiconductor Manufacturing and Process Control examines in detail the methodology by which electronic materials and supplies are converted into finished integrated circuits, and electronic products in a high-volume manufacturing environment. Num Pages: 488 pages, Illustrations. BIC Classification: TJFD5. Category: (P) Professional & Vocational. Dimension: 242 x 166 x 25. Weight in Grams: 776. . 2006. 1st Edition. Hardcover. . . . . Books ship from the US and Ireland.
[Olney, MD, U.S.A.] [Publication Year: 2006]